@misc{Sielanko_Juliusz_(1938-_)._Ion, author={Sielanko, Juliusz (1938- ). and Sowa, Marek (1944- ).}, howpublished={online}, publisher={UMCS}, language={eng}, type={artykuł}, title={Ion source with radiofrequency mass filter for sputtering purposes}, keywords={fizyka}, }